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潔凈度級別

塵埃最允許數(shù)/平方米

微生物最大允許數(shù)

≥0.5um

≥5um

浮游菌個(gè)/立方米

沉降菌個(gè)/皿.30min

100

3500

0

5

1

10000

350,000

2,000

100

3

100000

3,500,000

20,000

500

10

300000

10,500,000

61,800

NA

15

個(gè)/M³≥0.5um

ISO
14644-1(1999)

US
209E(1992)

US
209D(1988)

EEC
GGMP(1989)

FRANCE
AFNOR(1981)

GERMANY
VDI 2083(1990)

JAPAN
JAOA(1989)

1

-

-

-

-

-

-

-

3.5

2

-

-

-

-

0

2

10.0

-

M1

-

-

-

-

-

35.3

3

M1.5

1

-

-

1

3

100

-

M2

-

-

-

-

-

353

4

M2.5

10

-

-

2

4

1,000

-

M3

-

-

-

-

-

3,530

5

M3.5

100

A+B

4,000

3

5

10,000

-

M4

-

-

-

-

-

35,300

6

M4.5

1,000

1,000

-

4

6

100,000

-

M5

-

-

-

-

-

353,000

7

M5.5

10,000

C

400,000

5

7

1,000,000

-

M6

-

-

-

-

-

3,530,000

8

M6.5

100,000

D

4,000,000

6

8

10,000,000

-

M7

-

-

-

-

-

空氣潔凈度等級(N)

大于或等于表中粒徑的最大濃度限值(pc/m³)

0.1um

0.2um

0.3um

0.5um

1um

5um

1

10

2

2

100

24

10

4

3

1000

237

102

35

8

4

10000

2370

1020

352

83

5

100000

23700

10200

3520

832

29

6

1000000

237000

102000

35200

8320

293

7

352000

83200

2930

8

3520000

832000

29300

9

35200000

8320000

293000

潔凈度級別

粒 徑 (um)

0.1

0.2

0.3

0.5

5.0

1

35.0

7.50

3.00

1.00

NA

10

350

75.0

30.0

10.0

NA

100

NA

750

300

100

NA

1000

NA

NA

NA

1000

7.0

10000

NA

NA

NA

10000

70.3

100000

NA

NA

NA

100000

700